The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 1986
Filed:
Apr. 30, 1985
Applicant:
Inventors:
Lubomir L Jastrzebski, Plainsboro, NJ (US);
John F Corboy, Jr, East Amwell Township, Hunterdon County, NJ (US);
Robert H Pagliaro, Jr, Mercer County, NJ (US);
Ramazan Soydan, Berkley Township, Ocean County, NJ (US);
Assignee:
RCA Corporation, Princeton, NJ (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156628 ; 148175 ; 156653 ; 156657 ; 156662 ; 252 793 ; 427 86 ; 427 93 ;
Abstract
A method for substantially uniformly thinning a silicon layer comprises providing a silicon layer having a surface, oxidizing substantially all of the surface so as to transform a uniformly thick layer of silicon into oxide, and removing all the oxide so as to expose the silicon layer.