The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1984
Filed:
Nov. 10, 1981
Applicant:
Inventors:
Shigeru Nishimatsu, Kokubunji, JP;
Keizo Suzuki, Hachioji, JP;
Noriyuki Sakudo, Ome, JP;
Ken Ninomiya, Tokyo, JP;
Hidemi Koike, Tokorozawa, JP;
Osami Okada, Chofu, JP;
Shinjiro Katagiri, Katsuta, JP;
Sadayuki Okudaira, Kokubunji, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05G / ;
U.S. Cl.
CPC ...
219 / ; 2191 / ; 2191 / ; 219 / ;
Abstract
The microwave plasma source of this invention comprises a vacuum room which forms a discharging space with discharge gas introduced therein, a means for conducting the microwave to the discharging space so that the microwave electric field is provided in the discharging space, and a means for providing the magnetic field in the discharging space located on the microwave propagating path and made up of a permanent magnet which virtually propagates the microwave.