The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 1983
Filed:
Aug. 26, 1981
Hideki Tateishi, Yokohama, JP;
Tsuneaki Kamei, Kanagawa, JP;
Katsuo Abe, Yokosuka, JP;
Shigeru Kobayashi, Kawasaki, JP;
Susumu Aiuchi, Yokohama, JP;
Masashi Nakatsukasa, Tama, JP;
Nobuyuki Takahashi, Mitaka, JP;
Ryuji Sugimoto, Sagamihara, JP;
Hitachi, Ltd., Tokyo, JP;
Anelva Corporation, Tokyo, JP;
Abstract
An apparatus for performing continuous treatment in vacuum including an inlet chamber, a first intermediate chamber, at least one vacuum treating chamber, a second intermediate chamber and a withdrawing chamber arranged in the indicated order in a direction in which base plates are successively transferred. An opening device normally closed and opened when a base plate is transferred therethrough is mounted on a wall at the inlet of the inlet chamber, between the adjacent chambers and on a wall at the outlet side of the withdrawing chamber. A conveyor device for conveying each base plate in a horizontal direction through the opening device is mounted in each of the chambers, and an evacuating device is also mounted in each chamber. A base plate storing device for storing a plurality of base plates in a magazine is mounted in the first and second intermediate chambers. At least one vacuum treating device is mounted in the vacuum treating chamber.