The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2026
Filed:
Oct. 11, 2022
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
The present invention relates to a substrate processing apparatus for processing a substrate. The substrate processing apparatus () at least one first processing module () configured to process a substrate W using a liquid; at least one second processing module () configured to process the substrate W that has been processed by the first processing module (); a transfer robot () which is placed in a transfer area () for transferring the substrate W from the first processing module () to the second processing module (); a pair of gutters () which are disposed above a floor () provided in the transfer area () and coupled to drain lines (); and at least one inclined plate () which is hung over the pair of gutters (). An upper surface of the inclined plate () extends from one of the pair of gutters () to the other at an angle with respect to a horizontal direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile