The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2026
Filed:
Jan. 02, 2024
Applied Materials Israel Ltd., Rehovot, IL;
Uri Hadar, Tel-Aviv, IL;
Doron Girmonsky, Raanana, IL;
Dror Shemesh, Hod Hasharon, IL;
Michal Eilon, Beit-Elazari, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
A system for non-destructive characterization of specimens that includes an electron beam (e-beam) source for projecting e-beams at one or more e-beam landing energies on a specimen; an X-ray detector for sensing X-rays emitted from the specimen, thereby obtaining measurement data; and processing circuitry configured to: (i) extract from the measurement data key features specified by a vector {right arrow over (f)}; and (ii) estimate values {right arrow over (p)} of one or more structural parameters, characterizing the specimen, based on {right arrow over (f)}and a set of vectors of ground truth (GT) and simulated key features Each of the {right arrow over (f)}is a product of GT measurements or of computer simulations of emission of X-rays from a respective GT or simulated specimen due to impinging thereof with e-beams at each of the one or more landing energies.
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