Packaging architecture with trench via routing for on-package high-speed interconnects

Abstract

Embodiments of a microelectronic assembly comprise: a package substrate comprising a conductive trace in a dielectric material, the conductive trace surrounded by a conductive structure coupled to a ground connection, the package substrate further comprising metallization layers alternating with dielectric layers of the dielectric material; and an integrated circuit (IC) die coupled to a surface of the package substrate, the IC die being coupled to the conductive trace by a conductive pathway. The dielectric layers and the metallization layers are parallel to the surface of the package substrate, the conductive trace comprises a trench via in one of the dielectric layers, and the conductive structure comprises grounded plates extending across a length and width of the package substrate in metallization layers on either side of the dielectric layer.