The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Aug. 20, 2024
Shanghai Huali Integrated Circuit Corporation, Shanghai, CN;
Zhiqi Yuan, Shanghai, CN;
Jiazhang Xu, Shanghai, CN;
Shanghai Huali Integrated Circuit Corporation, Shanghai, CN;
Abstract
The present disclosure provides a contact filling method, removing the second oxide layer and the second SiN layer above the first oxide layer on the side provided with no Co layer, until an upper surface of the TiN layer is exposed, so as to form a first contact; removing the second oxide layer and first SiN layer above the first oxide layer on the side provided with the Co layer by etching, until the upper surface of the Co layer is exposed, so as to form a second contact; forming a selective Co layer on the TiN layer at the bottom of the first contact and on the Co layer at the bottom of the second contact respectively; and filling the first contact and the second contact with tungsten respectively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile