The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
May. 31, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Eric Chin Hong Ng, Livermore, CA (US);
Todd Egan, Fremont, CA (US);
Mehdi Vaez-Iravani, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments described herein relate to an apparatus that includes a light engine with a plurality of light sources. In an embodiment, each of the plurality of light sources is configured to emit a spectral band with different wavelength bandwidth. The apparatus may also include a beam splitter that is optically coupled to the light engine, where the beam splitter splits the spectral bands into a first optical path and a second optical path. In an embodiment, a power monitor is optically coupled to the beam splitter along the first optical path, and a reflective objective lens is optically coupled to the beam splitter along the second optical path. In an embodiment, the reflective objective lens includes a first mirror and a second mirror. In an embodiment, the apparatus further includes an optical sensor configured to measure the spectral bands after the spectral bands have reflected off of a substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile