The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Apr. 28, 2023
Tokyo Electron Limited, Tokyo, JP;
Kandabara Tapily, Albany, NY (US);
Robert D. Clark, Leuven, BE;
Gerrit Leusink, Albany, NY (US);
Charlotte Cutler, Albany, NY (US);
Jeffrey Smith, Albany, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
In certain embodiments, a method of microfabrication includes depositing a 2D polymer material over a substrate surface having a first material and a second material such that the 2D polymer adheres to the first material without adhering to the second material. The method further includes depositing a target material over the second material. The 2D material adhered to the first material inhibits deposition of the target material over the first material. The method further includes removing the 2D polymer material.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile