The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Nov. 28, 2022
Tokyo Electron Limited, Tokyo, JP;
Tatsuya Tokumaru, Koshi City, JP;
Tadashi Nishiyama, Koshi City, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate inspection method includes acquiring a reference input image based on a captured image of a surface of a reference substrate; acquiring, when the reference input image is inputted into a neural network, reference intermediate information generated in an intermediate layer of the neural network; generating a reference feature image representing a feature of the reference input image based on the reference intermediate information; acquiring an inspection input image based on a captured image of a surface of an inspection target substrate; acquiring inspection intermediate information generated in the intermediate layer when the inspection input image is inputted into the neural network; generating an inspection feature image representing a feature of the inspection input image based on the inspection intermediate information; and determining an abnormality on the surface of the inspection target substrate based on a result of comparing the reference feature image and the inspection feature image.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile