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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12753502 B1

PDFFull Text
Date of Patent:
Oct. 06, 2026

Filed:

Jun. 02, 2022

Shower head, electrode unit, gas supply unit, substrate processing apparatus, and substrate processing system

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Ryutaro Suda, Miyagi, JP;

Maju Tomura, Miyagi, JP;

Susumu Nogami, Miyagi, JP;

Hideaki Yakushiji, Miyagi, JP;

Takahiro Murakami, Miyagi, JP;

Yusuke Wako, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

XSENSUS LLP

Primary Examiner:

Rudy Zervigon

Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45565 (2013.01); C23C 16/4404 (2013.01); C23C 16/4558 (2013.01); C23C 16/52 (2013.01);
Abstract

A shower head for plasma processing includes a body part having a first surface, a second surface opposite to the first surface, and a plurality of inner side surfaces. The plurality of inner side surfaces is configured to define a plurality of gas holes penetrating through the body part from the first surface to the second surface. The second surface is made of a first corrosion-resistant material.

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Suda, Ryutaro. (2026). Shower head, electrode unit, gas supply unit, substrate processing apparatus, and substrate processing system (U.S. Patent No. 12753502). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12753502

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