The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Apr. 20, 2022
Entegris, Inc., Billerica, MA (US);
Sungcheol Yoon, Hwaseong-si, KR;
Hyunho Jung, Hwaseong-si, KR;
Jongwon Nam, Pyeongtaek-si, KR;
Shane Nunes, Cedar Park, TX (US);
Pei Zhao, Leander, TX (US);
Anthony D. Ozzello, Round Rock, TX (US);
Entegris, Inc., Billerica, MA (US);
Abstract
Provided is a method for purification of iodosilanes, such as diiodosilane. In this method, trace amounts of certain metal ion contaminants are removed, thus providing certain liquid compositions comprising the iodosilanes, which can be used advantageously in the deposition of silicon-containing films onto microelectronic device substrates.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile