The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Jun. 04, 2024
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Cheng-Tai Fang, Tainan City, TW;
Keng-Ying Liao, Tainan City, TW;
PO-Zen Chen, Tainan City, TW;
Wei-Cheng Chu, Tainan City, TW;
Chien-Chung Chen, Kaohsiung City, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
A semiconductor inspection tool may include a distance monitoring system that is configured to monitor the distance between a microscope of the semiconductor inspection tool and a semiconductor workpiece under inspection. The distance monitoring system may include a support member and a monitoring device mounted to an end of the support member. An opposing end of the support member may be coupled to the microscope, and an actuator may be used to spin the monitoring device around the microscope using the support member. The monitoring device is configured to spin around the microscope and generate images and/or a video that can be used to monitor the distance between the microscope and the surface of the semiconductor workpiece to ensure that a minimum distance between the microscope and the semiconductor workpiece is maintained.