Ultra-scaled transistor devices to enable cell size scaling

Abstract

Narrow-channel, non-planar transistors and their manufacture on integrated circuit dies. A method includes forming channel portions of transistors from sidewall spacers by removing backbone features and coupling a gate structure, a source, and a drain to the channel portions. An integrated circuit die includes a gate structure, a source, and a drain coupled to pair-symmetric channel portions with sidewalls of differing heights. A method includes iteratively etching away portions of semiconductor material not covered by a mask or a passivation layer, revealing a channel portion by removing the mask and passivation layer, and coupling a gate structure, a source, and a drain to the channel portion. An integrated circuit die includes a gate structure, a source, and a drain coupled to a channel portion with vertically alternating, greater and lesser widths.