The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
Mar. 07, 2023
Asml Netherlands B.v., Veldhoven, NL;
Derk Ferdinand Walvoort, Pijnacker, NL;
Dmitry Mudretsov, Delft, NL;
Xuerang Hu, San Jose, CA (US);
Qingpo XI, Fremont, CA (US);
Jurgen Van Soest, Amersfoort, NL;
Marco Jan-Jaco Wieland, Delft, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed herein is an electron-optical assembly for an electron-optical column for projecting a charged particle beam along a beam path towards a target, the electron-optical assembly comprising: electromagnetic shielding surrounding the charged particle beam path and configured to shield the charged particle beam from an electromagnetic field external to the electromagnetic shielding; wherein the electromagnetic shielding comprises a plurality of sections extending along different positions along the beam path, each section surrounding the charged particle beam, wherein the sections are separable.