The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2026
Filed:
Dec. 24, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Yuto Kubonaka, Tokyo, JP;
Masaomi Ohno, Tokyo, JP;
Koichiro Takeuchi, Tokyo, JP;
Kotaro Hosoya, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A hydrocarbon gas, which is a precursor of contamination, is dissociated by electron irradiation of a cleaner using electrons, carbon is deposited on members in a sample chamber and on a surface of a sample, and components inside the sample chamber are contaminated. Therefore, a device is provided that includes a sample chamberconnected to a lens barrelhaving a charged particle source, an electron sourcedisposed in a sample chamber, and a shield platedisposed in front of the electron source. An inside of the sample chamber is cleaned by secondary electrons emitted when primary electrons emitted from the electron source collide with the shield plate.