Apparatus including memory word line structure

Abstract

Some embodiments of the disclosure provide an apparatus comprising: a word line array including a plurality of word lines each extending through a memory mat in a first horizontal direction, the plurality of word lines including first and second word lines arranged adjacent to each other in a second horizontal direction; and a word line contact of the first word line, the word line contact separated from the second word line by a gap. The first and second word lines each have a first oxide film at a center area of the word line array in the memory mat. The first and second word lines each have a second oxide film at an edge area of the word line array outside the memory mat, the second oxide film having a thickness greater than a thickness of the first oxide film.