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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12716765 B1

PDFFull Text
Date of Patent:
Aug. 25, 2026

Filed:

Sep. 27, 2023

Systems and methods for detecting malfunctions within a gas distribution system

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Daemian Raj Benjamin Raj, Fremont, CA (US);

Hassan Ali, Santa Clara, CA (US);

Travis Clark Mazzy, Fremont, CA (US);

Thorsten Kril, Santa Cruz, CA (US);

Vignesh Kumar Venkateshwar, Sunnyvale, CA (US);

Venkatanarayana Shankaramurthy, San Jose, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Peter J Macchiarolo

Assistant Examiner:

John M Royston

Int. Cl.
CPC ...
G01F 25/10 (2022.01); G01M 3/28 (2006.01); G05D 7/06 (2006.01); F17D 5/00 (2006.01);
U.S. Cl.
CPC ...
G01F 25/10 (2022.01); G05D 7/0617 (2013.01); F17D 5/00 (2013.01); G01M 3/2815 (2013.01);
Abstract

Systems and methods for monitoring and detecting a malfunction within a gas distribution system are provided. A system may first enable, by a controller, gas flow through a flow path of the gas distribution system. Afterwards, the system may receive data including pressure data and/or flow rate data associated with the flow path of the gas distribution system while gas flow is enabled through the flow path. The system may process the data to determine whether the first flow path of the gas distribution system includes a malfunction. Responsive to determining that the flow path includes a malfunction, the system may determine a relative location of the malfunction within the flow path, with respect to a mass flow controller (MFC) or sensor within the flow path. The system may generate a report indicating whether the flow path includes a malfunction and a relative location of any determined malfunction.

Find Patent Forward Citations

Benjamin Raj, Daemian. (2026). Systems and methods for detecting malfunctions within a gas distribution system (U.S. Patent No. 12716765). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12716765

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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