The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2026

Filed:

May. 17, 2023
Applicant:

Stmicroelectronics International N.v., Geneva, CH;

Inventors:

Pascal Fornara, Pourrières, FR;

Antonin Chollet, Aix-en-Provence, FR;

Julien Amouroux, Aix en Provence, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10W 20/20 (2026.01); H10D 62/10 (2025.01); H10W 10/00 (2026.01); H10W 10/20 (2026.01); H10W 20/00 (2026.01);
U.S. Cl.
CPC ...
H10W 20/20 (2026.01); H10D 62/115 (2025.01); H10W 10/021 (2026.01); H10W 10/20 (2026.01); H10W 20/074 (2026.01);
Abstract

A method for manufacturing a semiconductor device includes depositing a first protective layer over a first conductive feature and a second conductive feature. The first protective layer covers respective sidewalls and top surfaces of the first conductive feature and the second conductive feature. A portion of the first protective layer between the first conductive feature and the second conductive feature is removed. After removing the portion of the first protective layer, an intermetal dielectric layer is formed between the first conductive feature and the second conductive feature.


Find Patent Forward Citations

Loading…