The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Jul. 18, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Piyush Kumar Pandey, Bangalore, IN;
Prabal Sen, Bangalore, IN;
Ganapathy Saravanavel, Madurai, IN;
Himadri Shekhar Handsa, Bangalore, IN;
Mohammed Dilkash Azam, Bangalore, IN;
Sidharth Bhatia, Santa Cruz, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/18 (2006.01); G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
G05B 19/188 (2013.01); G05B 23/0297 (2013.01); G05B 2219/45031 (2013.01); G05B 2223/06 (2018.08);
Abstract
A method includes obtaining first data indicative of a measured profile of a substrate. The method further includes obtaining second data indicative of a profile of a reference substrate. The method further includes determining a corrected substrate profile based on the first data and the second data. The method further includes performing a corrective action based on the corrected substrate profile.