The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2026

Filed:

Nov. 07, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Dheeraj Kumar, San Jose, CA (US);

Samit Barai, Chennai, IN;

Pardeep Kumar, Greater Noida, IN;

Sundar Narayanan, Cupertino, CA (US);

Anantha Sethuraman, Palo Alto, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/31 (2020.01); G01R 31/28 (2006.01); G01R 31/319 (2006.01); G05B 23/02 (2006.01); G06F 30/3308 (2020.01); G06F 119/18 (2020.01);
U.S. Cl.
CPC ...
G06F 30/31 (2020.01); G01R 31/2848 (2013.01); G01R 31/31912 (2013.01); G05B 23/0216 (2013.01); G06F 30/3308 (2020.01); G05B 2219/49029 (2013.01); G06F 2119/18 (2020.01);
Abstract

A method includes receiving feature data defining a plurality of features of a virtual substrate. The method further includes preparing the virtual substrate for display on a graphical user interface (GUI). The method further includes receiving one or more first inputs via the GUI. The one or more first inputs are associated with one or more locations of the virtual substrate. The method further includes defining a three-dimensional measurement probe based on the one or more first inputs. The method further includes outputting a measurement of the measurement probe. The measurement is associated with a characteristic of the virtual substrate measured by the three-dimensional measurement probe.


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