The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Nov. 17, 2020
Applicant:
Aixtron SE, Herzogenrath, DE;
Inventors:
Marcel Kollberg, Würselen, DE;
Benjamin David Wright, Cambridge, GB;
Merim Mukinovic, Würselen, DE;
Barry O'neil, Herzogenrath, DE;
Marc Plummer, Cambridgeshire, GB;
Assignee:
AIXTRON SE, Herzogenrath, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45572 (2013.01); C23C 16/45508 (2013.01); C23C 16/45576 (2013.01); C23C 16/4558 (2013.01);
Abstract
A gas inlet element for a CVD reactor includes a cylindrical main body, which together with an outer wall, forms a gas outlet face. The outer wall surrounds at least one gas distribution chamber. A plurality of gas outlet openings originating in the gas distribution chamber open out into the gas outlet face. A cooling device includes a plurality of cooling channels running adjacently but separately in the outer wall, and the gas outlet openings extend between the cooling channels.