The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Jul. 14, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Anantha Subramani, San Jose, CA (US);
Yang Guo, Fremont, CA (US);
John Forster, Santa Clara, CA (US);
Wade Harrelson, Santa Clara, CA (US);
Andrew Tomko, Sunnyvale, CA (US);
Anthony Chan, Santa Clara, CA (US);
Sathya Swaroop Ganta, Sunnyvale, CA (US);
Mike Murtagh, Santa Clara, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool comprises a chamber, a chuck within the chamber, where the chuck is configured to rotate, a pedestal holder around the chuck, and a utility column coupled to the chuck. In an embodiment, the utility column comprises a magnetic coupler to enable rotation of portions of the utility column and the chuck, and a rotary electrical feedthrough.