The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Apr. 25, 2024
Applicant:
Yield Engineering Systems, Inc., Fremont, CA (US);
Inventors:
Assignee:
Yield Engineering Systems, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/14 (2006.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0414 (2026.01); B05B 1/14 (2013.01);
Abstract
A cleaning apparatus incudes a plurality of tubes with angled orifices. An angled liquid stream is directed through the orifices to impinge on a surface of a substrate and clean the surface as the substrate moves in one direction through the space between a pair of tubes. An angled gas stream is then directed through the orifices to impinge on the surface of the substrate and dry the surface as the substrate moves in the opposite direction between the pair of tubes.