The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

Oct. 20, 2021
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Huimei Zhou, Albany, NY (US);

Huiming Bu, Glenmont, NY (US);

Miaomiao Wang, Albany, NY (US);

Ruilong Xie, Niskayuna, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10W 20/41 (2026.01); H10D 84/83 (2025.01); H10W 20/00 (2026.01);
U.S. Cl.
CPC ...
H10W 20/427 (2026.01); H10D 84/83 (2025.01); H10D 84/834 (2025.01); H10W 20/056 (2026.01); H10W 20/089 (2026.01);
Abstract

A self-aligned buried power rail having an adjustable height is formed between a first semiconductor device region and a second semiconductor device region. The self-aligned buried power rail having the adjustable height has improved conductivity. Notably, the self-aligned buried power rail has a first portion having a first height that is present in a gate cut trench and a second portion having a second height, which is greater than the first height, that is present in a source/drain cut trench.


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