The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

Jul. 27, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chun Hsiung Tsai, Hsinchu County, TW;

Lai-Wan Chong, Kaohsiung City, TW;

Chien-Wei Lee, Hsinchu, TW;

Kei-Wei Chen, Tainan City, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 62/17 (2025.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 62/10 (2025.01); H10P 30/20 (2026.01);
U.S. Cl.
CPC ...
H10D 62/292 (2025.01); H10D 30/024 (2025.01); H10D 30/0241 (2025.01); H10D 30/6211 (2025.01); H10D 62/115 (2025.01); H10D 62/371 (2025.01); H10P 30/222 (2026.01);
Abstract

Present disclosure provides a FinFET structure, including a substrate, a fin protruding from the substrate, including a first portion and a second portion below the first portion, the second portion includes a lighter-doped region and a heavier-doped region adjacent to the lighter-doped region, wherein the first portion includes a first dopant concentration of a dopant, and the heavier-doped region includes a second dopant concentration of the dopant, the second dopant concentration is greater than the first dopant concentration, a gate over the fin, wherein the second portion of the fin is below a bottom surface of the gate, and an insulating layer over the substrate and proximal to the second portion of the fin, wherein at least a first portion of the insulating layer includes a third dopant concentration of the dopant, the third dopant concentration is greater than the first dopant concentration.


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