The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Dec. 28, 2022
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Emad Aqad, Northborough, MA (US);
Li Cui, Westborough, MA (US);
Yinjie Cen, Shrewsbury, MA (US);
Wenxu Zhang, Natick, MA (US);
Mingqi Li, Shrewsbury, MA (US);
James F. Cameron, Brookline, MA (US);
DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC, Marlborough, MA (US);
Abstract
A polymer, including a first repeating unit comprising a sulfone group, wherein the sulfone group is directly bonded to a group of formula —C(R)(R)—; and a second repeating unit comprising an acid labile group, a base-decomposable group, a polar group, or a combination thereof, wherein Rand Rare each independently hydrogen, halogen, substituted or unsubstituted Calkyl, substituted or unsubstituted Ccycloalkyl, substituted or unsubstituted Cheterocycloalkyl, substituted or unsubstituted Calkenyl, substituted or unsubstituted Ccycloalkenyl, substituted or unsubstituted Cheterocycloalkenyl, substituted or unsubstituted Caryl, substituted or unsubstituted Carylalkyl, substituted or unsubstituted Calkylaryl, substituted or unsubstituted Cheteroaryl, substituted or unsubstituted Cheteroarylalkyl, or substituted or unsubstituted Calkylheteroaryl, provided that at least one of Rand Ris hydrogen.