The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

Jun. 27, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Yu-Hao Chen, Hsinchu, TW;

Hui Yu Lee, Hsinchu, TW;

Jui-Feng Kuan, Hsinchu, TW;

Chien-Te Wu, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/01 (2006.01); H10N 10/01 (2023.01); H10N 10/17 (2023.01); H10N 10/80 (2023.01); H10N 10/851 (2023.01); H10N 10/852 (2023.01); H10N 10/855 (2023.01);
U.S. Cl.
CPC ...
G02F 1/0147 (2013.01); G02F 1/011 (2013.01); H10N 10/01 (2023.02); H10N 10/17 (2023.02); H10N 10/80 (2023.02); H10N 10/8556 (2023.02); G02F 2203/50 (2013.01); H10N 10/852 (2023.02); H10N 10/855 (2023.02);
Abstract

A method includes forming, over a substrate, an optical component and first, second and third thermal control mechanisms. The optical component includes first and second main paths, and first and second side paths each having opposite ends correspondingly coupled to the first and second main paths. The second side path is spaced from the first side path. Each of the first, second and third thermal control mechanisms includes a first thermoelectric member having a first conductivity type, a second thermoelectric member having a second conductivity type opposite to the first conductivity type, and a conductive structure that electrically connects the first thermoelectric member to the second thermoelectric member. The first side path is between the first and third thermal control mechanisms. The second side path is between the second and third thermal control mechanisms. The third thermal control mechanism is between the first and second side paths.


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