The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Oct. 12, 2023
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Daniel Fulford, Albany, NY (US);
Mark I. Gardner, Austin, TX (US);
Henry Jim Fulford, Marianna, FL (US);
Anton Devilliers, Albany, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 7/28 (2006.01); H03H 11/30 (2006.01);
U.S. Cl.
CPC ...
G01B 7/28 (2013.01);
Abstract
An apparatus for measuring bow of a wafer, includes a substrate holder having a support surface configured to support a wafer; and a capacitor array unit including a plurality of electrodes laterally spaced from one another in the capacitor array unit. Each electrode faces the support surface and is spaced a respective fixed distance from the support surface such that each electrode can form a capacitor with an opposing area of a substrate provided on the support surface of the substrate holder.