Semiconductor device and methods of formation

Abstract

Some implementations described herein provide a semiconductor device having an oxide-filled barrier structure between structures of gate-all-around transistors included in the semiconductor device. The use of the oxide-filled barrier structure may reduce a distance separating nanosheet structures of a p-type metal-oxide semiconductor fin structure and an n-type metal-oxide semiconductor fin structure, broaden an availability of work-function metals for gate structures formed around nanochannels of the p-type metal-oxide semiconductor fin structure and n-type metal-oxide semiconductor structure, and improve a performance of the gate-all-around transistors by reducing miller capacitances of the gate-all-around transistors. Furthermore, the oxide-filled barrier structure may enable the combining of the p-type metal-oxide semiconductor fin structure and the n-type metal-oxide semiconductor fin structure to form a type of integrated circuitry, such as an inverter.