The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

May. 20, 2022
Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Li Cui, Westborough, MA (US);

Emad Aqad, Northborough, MA (US);

Yinjie Cen, Shrewsbury, MA (US);

Conner A. Hoelzel, Brookline, MA (US);

James F. Cameron, Brookline, MA (US);

Jong Keun Park, Shrewsbury, MA (US);

Suzanne M. Coley, Mansfield, MA (US);

Choong-Bong Lee, Westborough, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 69/78 (2006.01); C07C 317/22 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 69/78 (2013.01); C07C 317/22 (2013.01); C07C 2601/08 (2017.05); C07C 2601/16 (2017.05);
Abstract

A compound represented by Formula (1): wherein X is a group having a valency of r; each Ris independently an organic group comprising an acid-labile group; m is an integer greater than or equal to 1; k is an integer from 1 to 5; and r is an integer from 2 to 10, wherein the compound is non-polymeric, and wherein Ar, L, L, R, and Rare as defined herein.


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