The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2026
Filed:
Mar. 29, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Adeka Corporation, Tokyo, JP;
Seung-Min Ryu, Hwaseong-si, KR;
Gyu-Hee Park, Hwaseong-si, KR;
Youn Joung Cho, Hwaseong-si, KR;
Kazuki Harano, Tokyo, JP;
Takanori Koide, Tokyo, JP;
Wakana Fuse, Tokyo, JP;
Yoshiki Manabe, Tokyo, JP;
Yutaro Aoki, Tokyo, JP;
Hiroyuki Uchiuzou, Tokyo, JP;
Kazuya Saito, Tokyo, JP;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Adeka Corporation, Tokyo, JP;
Abstract
Materials for fabricating a thin film that has improved quality and productivity are provided. The materials may include a Group 5 element precursor of formula (1): Mmay be a Group 5 element, each of Rto Rindependently ay be a hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 5 carbon atoms, or formula (2), Rmay be a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, and Lmay be an alkyl group, an alkylamino group, an alkoxy group or an alkylsilyl group, each of which may have 1 to 5 carbon atoms and may be substituted or unsubstituted. Formula (2) may have a structure of Each of Rto Rindependently may be a substituted or unsubstituted alkyl group having 1 to 5 carbon atoms.