The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2026
Filed:
Feb. 06, 2024
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Daichi Kondo, Tokyo, JP;
Koji Maeda, Tokyo, JP;
Kuniaki Yamaguchi, Tokyo, JP;
Koichi Fukaya, Tokyo, JP;
Kohei Sato, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 17/02 (2006.01); B08B 3/02 (2006.01);
U.S. Cl.
CPC ...
B08B 17/025 (2013.01); B08B 3/02 (2013.01); B08B 2203/0211 (2013.01);
Abstract
A washing apparatus includes: a housing; a holding part that holds a substrate arranged in the housing; a washing nozzle that supplies a washing liquid to the substrate held by the holding part; a gas nozzle that ejects a gas toward a ceiling of the housing; and a control part that controls the gas nozzle.