The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2026

Filed:

Oct. 31, 2022
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Hao Yang, Allen, TX (US);

Asad Haider, Plano, TX (US);

Guruvayurappan Mathur, Allen, TX (US);

Abbas Ali, Plano, TX (US);

Alexei Sadovnikov, Sunnyvale, CA (US);

Umamaheswari Aghroam, Richardson, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H10D 62/10 (2025.01);
U.S. Cl.
CPC ...
H01L 21/76229 (2013.01); H01L 21/76237 (2013.01); H10D 62/115 (2025.01);
Abstract

Active semiconductor devices in an integrated circuit are provided lateral electrical isolation by surrounding narrow deep trench isolation regions that are merged at shared portions of the narrow deep trench isolation regions. A wide deep trench isolation region laterally surrounds the merged narrow deep trench isolation regions.


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