The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Jul. 13, 2022
Asml Netherlands B.v., Veldhoven, NL;
Tiannan Guan, Eindhoven, NL;
Zhuangxiong Huang, Eindhoven, NL;
Johannes Bernardus Charles Engelen, 'S-Hertogenbosch, NL;
Güneş Nakiboǧlu, Eindhoven, NL;
Matthias Kruizinga, Veldhoven, NL;
Petrus Jacobus Maria Van Gils, Berkel-Enschot, NL;
Aldo Tralli, Eindhoven, NL;
Sjoerd Frans De Vries, Eindhoven, NL;
Marcel Maria Cornelius Franciscus Teunissen, Grathem, NL;
Richard Joseph Bruls, Eindhoven, NL;
Frits Van Der Meulen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention relates to an electrostatic holder comprising: a body, and a clamping element attached to the body, said clamping element comprising an electrode for applying an attractive force between the clamping element and a first to be clamped object, wherein an outer edge of the body is configured to provide a gap between the outer edge of the body and the first to be clamped object, which gap is configured for outputting a fluid for reducing dust particles reaching the first to be clamped object or a second to be clamped object on an opposite side of the holder.