The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Aug. 03, 2021
Applicant:
Mitsui Chemicals, Inc., Tokyo, JP;
Inventors:
Assignee:
MITSUI CHEMICALS, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/64 (2012.01); G03F 7/00 (2006.01); H10P 76/20 (2026.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); G03F 7/70033 (2013.01); G03F 7/70166 (2013.01); H10P 76/2041 (2026.01);
Abstract
A pellicle including: a pellicle film including a carbon-based film having a carbon content rate of 40 mass % or more; a support frame that supports the pellicle film; and an adhesive layer containing an adhesive, the pellicle having the total amount of aqueous outgas of 5.0×10Pa·L/sec or less in an atmosphere of 23° C. and 1×10Pa or less.