The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Aug. 21, 2023
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Christof Baur, Oberkochen, DE;
Julia Weber, Oberkochen, DE;
Dominik Schnoor, Oberkochen, DE;
Maximilian Rumler, Oberkochen, DE;
Johannes Schoeneberg, Oberkochen, DE;
Kinga Kornilov, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/84 (2012.01); G01Q 80/00 (2010.01); G03F 1/72 (2012.01);
U.S. Cl.
CPC ...
G03F 1/84 (2013.01); G01Q 80/00 (2013.01); G03F 1/72 (2013.01);
Abstract
The invention proposes a method for processing a sample with a processing arrangement, comprising the steps of: