The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2026

Filed:

May. 11, 2023
Applicant:

Zhuhai Access Semiconductor Co., Ltd, Guangdong, CN;

Inventors:

Xianming Chen, Guangdong, CN;

Juchen Huang, Guangdong, CN;

Xiaowei Xu, Guangdong, CN;

Benxia Huang, Guangdong, CN;

Gao Huang, Guangdong, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); G11C 5/06 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 23/495 (2006.01); H05K 1/02 (2006.01); H05K 1/185 (2026.01); H10B 51/10 (2023.01); H10B 51/20 (2023.01); H10D 30/01 (2025.01); H10D 30/47 (2025.01); H10D 62/85 (2025.01); H10D 64/64 (2025.01); H10H 20/852 (2025.01); H10H 20/857 (2025.01); H10W 40/47 (2026.01); H10W 70/05 (2026.01); H10W 70/60 (2026.01); H10W 70/63 (2026.01); H10W 74/10 (2026.01); H10W 90/00 (2026.01);
U.S. Cl.
CPC ...
H10W 40/47 (2026.01); H05K 1/0272 (2013.01); H05K 1/186 (2013.01); H10W 74/114 (2026.01); H05K 2201/10015 (2013.01); H05K 2201/10022 (2013.01); H05K 2201/1003 (2013.01); H10W 70/093 (2026.01); H10W 70/60 (2026.01); H10W 70/635 (2026.01); H10W 90/00 (2026.01);
Abstract

A liquid circulating cooling package substrate includes a circulating cooling structure including a cooling chamber in a first dielectric layer to expose a heat dissipation face, a metal heat dissipation layer on the inner surface of the cooling chamber, an upright support column formed on a metal heat dissipation layer, and a cooling cover supported on the support column to close the cooling chamber along the periphery of the cooling chamber. The metal heat dissipation layer completely covers the heat dissipation face and the inner side surface of the cooling chamber, and a liquid inlet and a liquid outlet are formed on the cooling cover. A circulating cooling structure is provided in the first dielectric layer, and the circulating cooling structure is formed during the processing of an embedded package substrate such that the processing flow is simple and the cost is low.


Find Patent Forward Citations

Loading…