The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Dec. 07, 2020
Tokyo Electron Limited, Tokyo, JP;
Masami Akimoto, Koshi, JP;
Naruaki Iida, Koshi, JP;
Tsunenaga Nakashima, Koshi, JP;
Keisuke Sasaki, Koshi, JP;
Takahiro Yasutake, Koshi, JP;
Kazuya Matsushita, Koshi, JP;
Kousei Ide, Koshi, JP;
Masato Ozeki, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A linearly moving mechanism includes an internal moving body provided within a case body and configured to be moved in a linear direction, the internal moving body being configured to move an external moving body connected to a connection member protruded from the case body through an opening formed at the case body; a seal belt extending in the linear direction and provided within the case body to close the opening, a first surface side of both end portions of the seal belt in a widthwise direction thereof facing an edge portion of the opening while being spaced apart therefrom; and a deformation suppressing member provided to face a second surface side of the both end portions to suppress deformation of the seal belt, the seal belt being connected to the internal moving body to be moved along with a movement of the internal moving body.