The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Jun. 12, 2023
Fei Company, Hillsboro, OR (US);
James S. Vickers, San Jose, CA (US);
Seema Somani, San Jose, CA (US);
Brian Tilley, Anna, TX (US);
Michael Berkmyre, Princeton, TX (US);
Richard Stallcup, Frisco, TX (US);
FEI Company, Hillsboro, OR (US);
Abstract
Systems, methods, and techniques for detecting a contact between a probe tip and a sample surface. A method can include dithering a probe in a plane substantially parallel with a surface using a periodic motion having a dither frequency. The method can include directing a beam of charged particles toward a region of the probe. The method can include generating detector data describing the periodic motion of the probe based at least in part on an interaction between the beam of charged particles and the region of the probe. The method can include displacing the probe toward the surface. The method can also include detecting a contact between the probe and the surface using the detector data.