The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Mar. 22, 2021
Applicant:
Nissan Chemical Corporation, Tokyo, JP;
Inventors:
Takahisa Okuno, Toyama, JP;
Masaki Yanai, Toyama, JP;
Takuya Fukuda, Toyama, JP;
Hiroto Ogata, Toyama, JP;
Shunsuke Moriya, Toyama, JP;
Hiroshi Ogino, Toyama, JP;
Tetsuya Shinjo, Toyama, JP;
Assignee:
NISSAN CHEMICAL CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C11D 7/50 (2006.01); B08B 3/08 (2006.01); C11D 7/24 (2006.01); C11D 7/32 (2006.01); H01L 21/02 (2006.01); B32B 43/00 (2006.01);
U.S. Cl.
CPC ...
C11D 7/5027 (2013.01); B08B 3/08 (2013.01); C11D 7/245 (2013.01); C11D 7/3281 (2013.01); C11D 7/5013 (2013.01); H01L 21/02079 (2013.01); B08B 2220/01 (2013.01); B32B 43/006 (2013.01); C11D 2111/22 (2024.01);
Abstract
A semiconductor substrate cleaning method including removing an adhesive layer provided on a semiconductor substrate by use of a remover composition, wherein the remover composition contains a solvent but no salt; and the solvent includes an organic solvent represented by any of formulae (L0) to (L4).