Deep trench capacitor and methods of forming the same

Abstract

Various embodiments of the present disclosure provide a semiconductor device structure. The semiconductor device structure comprises a substrate comprising a first trench, wherein the first trench extends into a front side surface of the substrate, a first trench capacitor comprising a plurality of first capacitor electrode layers and a plurality of first capacitor dielectric layers disposed in alternating manner within the first trench and over the front side surface of the substrate, wherein a first air gap is enclosed by the plurality of first capacitor electrode layers and the plurality of first capacitor dielectric layers within the first trench, an interconnect structure disposed over the first trench capacitor, wherein one or more first capacitor electrode layers of the plurality of first capacitor electrode layers are in electrical connection with a first conductive feature in a dielectric layer of the interconnect structure, and a first seal ring structure disposed in the interconnect structure and encircling an interior portion of the substrate, wherein at least a portion of the first seal ring structure is in contact with the first conductive feature.