The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Jul. 10, 2024
Kokusai Electric Corporation, Tokyo, JP;
Koei Kuribayashi, Toyama, JP;
Kenji Kameda, Toyama, JP;
Tsukasa Kamakura, Toyama, JP;
Takeo Hanashima, Toyama, JP;
Hiroaki Hiramatsu, Toyama, JP;
Shinya Ebata, Toyama, JP;
Hiroto Yamagishi, Toyama, JP;
Sadao Hisakado, Toyama, JP;
Takafumi Sasaki, Toyama, JP;
Takatomo Yamaguchi, Toyama, JP;
Shuhei Saido, Toyama, JP;
Kokusai Electric Corporation, Tokyo, JP;
Abstract
There is provided a technique that cleans a member in a process container by performing a cycle a predetermined number of times, the cycle including: (a) separately supplying a cleaning gas and additive gas that reacts with the cleaning gas, respectively, from first and second supply parts among at least three supply parts into the process container, and (b) separately supplying the cleaning and additive gases, respectively, from the second and first supply parts into the process container. (A) and (b) include stopping the supply of the cleaning and additive gases into the process container and exhausting the process container's interior. In at least one selected from the group of (a) and (b) an inert gas is supplied from each of the at least three supply parts at a same flow rate, after the supply of the cleaning and additive gases is stopped and before the process container is exhausted.