The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2026
Filed:
Mar. 22, 2021
Nissan Chemical Corporation, Tokyo, JP;
Takahisa Okuno, Toyama, JP;
Masaki Yanai, Toyama, JP;
Takuya Fukuda, Toyama, JP;
Hiroto Ogata, Toyama, JP;
Shunsuke Moriya, Toyama, JP;
Hiroshi Ogino, Toyama, JP;
Tetsuya Shinjo, Toyama, JP;
NISSAN CHEMICAL CORPORATION, Tokyo, JP;
Abstract
The invention provides a semiconductor substrate cleaning method including a step of removing an adhesive layer provided on a semiconductor substrate by use of a remover composition, wherein the remover composition contains a solvent but no salt; and the solvent includes an organic solvent represented by formula (L) (in the formula, L represents a substituent to the benzene ring, and each of a plurality of Ls represents a C1 to C4 alkyl group; and k represents the number of Ls and is an integer of 0 to 5) in an amount of 80 mass % or more.