The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2026

Filed:

Jun. 28, 2024
Applicants:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

National Taiwan University, Taipei, TW;

Inventors:

Ya-Ting Chang, Yunlin County, TW;

Jian-Zhi Huang, Changhua County, TW;

Jin-Bin Yang, Taichung, TW;

I-Chih Ni, New Taipei, TW;

Chih-I Wu, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01); H10D 30/67 (2025.01); H10D 84/03 (2025.01); H10D 86/01 (2025.01); H10D 87/00 (2025.01); H10D 88/00 (2025.01); H10D 99/00 (2025.01);
U.S. Cl.
CPC ...
H01L 21/02614 (2013.01); H01L 21/02568 (2013.01); H01L 21/76843 (2013.01); H01L 21/76856 (2013.01); H10D 84/038 (2025.01); H10D 86/01 (2025.01); H10D 87/00 (2025.01); H10D 88/01 (2025.01); H10D 99/00 (2025.01); H01L 23/53209 (2013.01); H01L 23/53223 (2013.01); H01L 23/53238 (2013.01); H01L 23/53266 (2013.01); H10D 30/67 (2025.01);
Abstract

An integrated circuit device includes a substrate, a first transition metal dichalcogenide layer over the substrate, a dielectric layer over the first transition metal dichalcogenide layer, a first gate electrode, and a first source contact and a first drain contact. The first transition metal dichalcogenide layer has a surface roughness greater than 0.5 nm and less than 1 nm. The first gate electrode is over the dielectric layer and a first portion of the first transition metal dichalcogenide layer. The first source contact and the first drain contact are respectively connected with a second portion and a third portion of the first transition metal dichalcogenide layer. The first portion of the first transition metal dichalcogenide layer is between the second and third portions of the first transition metal dichalcogenide layer.


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