The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Jan. 08, 2024
Applied Materials Israel Ltd., Rehovot, IL;
Albert Kao, Taipei, TW;
Shih-Wei Yang, Hsinchu, TW;
Chun-Hsiang Yen, Hsinchu, TW;
Boaz Cohen, Lehavim, IL;
Yen Cheng Chiang, Hukou Township, Hsinchu County, TW;
Ching-Hung Lai, Hsinchu, TW;
Chenwei Huang, Hsinchu, TW;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
There is provided a system and method of examination of a semiconductor specimen. The method includes obtaining a group of defect candidates associated with respective inspection locations represented in an inspection coordinate system; using a trained machine learning (ML) model to provide, for each defect candidate, a probability of the defect candidate being a defect of interest (DOI), and ranking the group of defect candidates to an ordered list according to respective probabilities thereof, in response to a part of the ordered list of defect candidates being reviewed by a review tool in accordance with an order thereof, receiving a predefined number of DOIs associated with respective review locations represented in a review coordinate system; and calculating an offset between the review coordinate system and the inspection coordinate system based on respective inspection and review locations associated with the predefined number of DOIs.