The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Oct. 07, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Hanish Kumar Panavalappil Kumarankutty, Bangalore, IN;
Yogesh Tomar, Bangalore, IN;
Nikshep M. Patil, Bangalore, IN;
Hari Venkatesh Rajendran, Bangalore, IN;
Kirubanandan Naina Shanmugam, Bangalore, IN;
Gayatri Natu, Mumbai, IN;
Mahesh Arcot, Mumbai, IN;
Senthil Kumar Nattamai Subramanian, Hosur, IN;
Steven D. Marcus, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.