The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2025

Filed:

Jul. 26, 2023
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Pinlei Edmund Chu, Hsinchu, TW;

Chun-Wei Hsu, Hsinchu, TW;

Ling-Fu Nieh, Taipei, TW;

Chi-Jen Liu, Taipei, TW;

Liang-Guang Chen, Hsinchu, TW;

Yi-Sheng Lin, Taichung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 11/00 (2006.01); C11D 7/26 (2006.01); H01L 21/02 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
C11D 7/261 (2013.01); C11D 7/268 (2013.01); H01L 21/02074 (2013.01); C11D 2111/22 (2024.01); H01L 21/3212 (2013.01);
Abstract

A semiconductor cleaning solution for cleaning a surface of a semiconductor device, and a method of use and a method of manufacture of the cleaning solution are disclosed. In an embodiment, a material is polished away from a first surface of the semiconductor device and the first surface is cleaned with the cleaning solution. The cleaning solution may include a host having at least one ring. The host may have a hydrophilic exterior and a hydrophobic interior.


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