The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Aug. 19, 2021
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
Boris Kogan, Norwalk, CT (US);
Robert Jeffrey Wade, Stamford, CT (US);
George Hilary Harrold, Redding, CT (US);
Matthew Boudreau, Norwalk, CT (US);
Assignee:
ASML HOLDING N.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); G03F 1/00 (2012.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
G03F 1/06 (2013.01); H01L 21/67259 (2013.01); H01L 21/67359 (2013.01); H01L 21/67379 (2013.01); H01L 21/6773 (2013.01); H01L 21/68707 (2013.01);
Abstract
Systems, apparatuses, and methods are provided for transporting a reticle chamber (pod) for processing. In one example, a system for transporting the pod is disclosed. The system may include a moving apparatus, abase coupled to the moving apparatus, and a gripping ring extending from the base. In some aspects, the gripping ring grips a flange extending from the pod. The moving apparatus moves the base in response to the gripping ring gripping the flange.