The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2025

Filed:

Feb. 15, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

U-Ting Chiu, Hsinchu, TW;

Yu-Shih Wang, Tainan, TW;

Chun-Cheng Chou, Taichung, TW;

Yu-Fang Huang, Hsinchu, TW;

Chun-Neng Lin, Hsin-Chu, TW;

Ming-Hsi Yeh, Hsinchu, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/768 (2006.01); H01L 23/535 (2006.01); H10B 10/00 (2023.01);
U.S. Cl.
CPC ...
H01L 23/535 (2013.01); H01L 21/31116 (2013.01); H01L 21/32134 (2013.01); H01L 21/76805 (2013.01); H01L 21/76892 (2013.01); H01L 21/76895 (2013.01); H01L 23/5283 (2013.01); H10B 10/12 (2023.02); H10B 10/18 (2023.02);
Abstract

A connecting structure includes a substrate, a first conductive feature, a second conductive feature, a third conductive feature over the first conductive feature, and a fourth conductive feature over the second conductive feature. The substrate includes a first region and a second region. The first conductive feature is disposed in the first region and has a first width. The second conductive feature is disposed in the second region and has a second width greater than the first width of the first conductive feature. The third conductive feature includes a first anchor portion surrounded by the first conductive feature. The fourth conductive feature includes a second anchor portion surrounded by the second conductive feature. A depth difference ratio between a depth of the first anchor portion and a depth of the second anchor portion is less than approximately 10%.


Find Patent Forward Citations

Loading…